- intrinsic gettering
- внутрішнє гетерування, гетерування з внутрішнім гетером
English-Ukrainian dictionary of microelectronics. 2013.
intrinsic gettering
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Materials for use in vacuum — are materials showing very low rate of outgassing in vacuum, and, where applicable, tolerant to the bake out temperatures. The requirements grow increasingly stringent with the desired degree of vacuum achievable in the vacuum chamber. The… … Wikipedia
